Assessment of dielectric charging in micro-electro-mechanical system capacitive switches

Compact Model of Dielectric Charging in RF MEMS Capacitive Switches

RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...

Dielectric charging effects in floating electrode MEMS capacitive switches

Dielectric Charging in Capacitive RF MEMS Switches: The Effect of Dielectric Film Leakage

A Model to Predict Temperature Acceleration of Dielectric-charging Effects in Rf Mems Capacitive Switches (preprint)

Temperature acceleration of dielectriccharging effects in state-of-the-art RF MEMS capacitive switches was characterized and modeled. From the measured charging and discharging transient currents across the switching dielectric, densities and time constants of traps in the dielectric were extracted under different temperatures. It was found that, while charging and discharging time constants ar...

A Compact Model for Dielectric Charging in RF MEMS Capacitive Switches

A unified, macroscopic, one-dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS switches. The fidelity of the model relies upon the utilization of experimentally-obtained data to assign values to model parameters that capture the non-linear behavior of the dielectric charging process. The proposed model can be easily cast in the form ...